Niobium sputtering targets
Purity : 2N, 2N7,3N, 3N5 or best purity with 99.95%
Chemical composition required:
Fe 20 ppm max.
Ni 25ppm max.
Cr 5 ppm max.
Cu 5 ppm max.
Zr 50 ppm max.
P 30 ppm max.
Si 30 ppm max.
Ta 400 ppm max.
W 50 ppm max.
Mo 50 ppm max.
Na 3 ppm max.
Li 5 ppm max.
K 3 ppm max.
U 0.1 ppm max.
Th 0.1 ppm max.
Others 10 ppm max.
C 40 ppm max.
O 150 ppm max.
N 100 ppm max.
H 15 ppm max.
Surface finish: Ra 0.4 ( RMS64 or better)
Flatness : 0.1mm
Grain size: 60 micron or ASTM 4 or better.
Tolerance: +/-0.010" on all dimensions
Size available :
Niobium target (round target) :
1" up to 15" diamter x 0.2362" to 0.25" thickness;
Niobium target (rectangular target and square target):
0.125" to 0.5000" thickness x 4.92" up to 25.59" width x 40" Length.
Typical size :
Round Niobium target :
Tolerance : +/-0.010" on all dimensions
50.8mm diameter x 3.175mm thickness ( 2" dia X .125" thk), purity 3N8
50.8mm diameter x 6.35mm thickness ( 2" dia X .250" thk), purity 3N8
101.6mm diameter x 3.175mm thickness( 4" dia X .125" thk), purity 3N8
101.6mm diameter x 6.35mm thickness ( 4" dia X .250" thk), purity 3N8
127mm diameter x 3.175mm thickness( 5" dia X .125" thk), purity 3N8
127mm diameter x 6.35mm thickness ( 5" dia X .250" thk), purity 3N8
152.4mm diameter x 3.175mm thickness( 6" dia X .125" thk), purity 3N8
152.4mm diameter x 6.35mm thickness ( 6" dia X .25" thk), purity 3N8
262mm diameter x 12.7mm thickness (10.31" dia X .50" thk), purity 3N5
6.00mm Thickness x 203.20mm Diameter;
6.35mm Thickness x 381mm Diameter;
Rectangular Niobium target :
5.08mm x 124.97mm x 698.50 (0.20" Thickness x 4.92" Width x 27.50" Length);
6.35mm x 177.80mm x 635mm (0.25" Thickness x 7.0" Width x 25" Length);
6.00mm Thickness x 138mm Width x 300mm Length;
6.35mm Thickness x 200mm Width x 650mm Length;
We can tailor the sizes upon request.
